| Citation: |
Fang Dongming, Fu Shi, Zhou Yong, Zhao Xiaolin. A Tunable Micromechanical Capacitor Driven by Electrostatic Force[J]. Journal of Semiconductors, 2007, 28(9): 1454-1458.
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Fang D M, Fu S, Zhou Y, Zhao X L. A Tunable Micromechanical Capacitor Driven by Electrostatic Force[J]. Chin. J. Semicond., 2007, 28(9): 1454.
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A Tunable Micromechanical Capacitor Driven by Electrostatic Force
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Abstract
A radio frequency (RF) tunable micromechanical capacitor with a high quality factor driven by the electrostatic force was fabricated using simple MEMS technology.The surface profile and the displacement of the variable capacitor at different values of applied voltage are measured by using a WYKO NT1100 optical surface profiler.The measured results show that the pull-in voltage is 13.5V,the tuning ratio of the capacitor is 13.1∶1,and the quality factor and the capacitance are 51.6 and 0.79pF at 1GHz,respectively.-
Keywords:
- tunable capacitor,
- RF MEMS,
- quality factor
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References
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Proportional views
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