| Citation: |
Gao Jianxia, Song Guofeng, Gan Qiaoqiang, Xu Yun, Guo Baoshan, Chen Lianghui. Fabrication and Characteristics of Nano-Aperture Vertical-Cavity Surface-Emitting Laser[J]. Journal of Semiconductors, 2007, 28(2): 265-268.
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Gao J X, Song G F, Gan Q Q, Xu Y, Guo B S, Chen L H. Fabrication and Characteristics of Nano-Aperture Vertical-Cavity Surface-Emitting Laser[J]. Chin. J. Semicond., 2007, 28(2): 265.
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Fabrication and Characteristics of Nano-Aperture Vertical-Cavity Surface-Emitting Laser
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Abstract
Nano-aperture vertical-cavity surface-emitting lasers were fabricated on common 850nm VCSELs.When the size of the aperture was 400nm×400nm,the maximum far-field output power reached 0.3mW at a driving current of 25mA,and the power density was about 2mW/μm2.The fabrication process is introduced here.Spectra and lifetime characteristics of the devices are also analyzed. -
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