Chin. J. Semicond. > 2003, Volume 24 > Issue 6 > 668-672

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蓝宝石衬底的ECR等离子体清洗与氮化的RHEED研究

秦福文 , 顾彪 , 徐茵 and 杨大智

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Key words: 蓝宝石, 清洗, 氮化, RHEED, GaN

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    Received: 20 August 2015 Revised: Online: Published: 01 June 2003

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      Article Navigation >  Journal of Semiconductors  > 2003  >  24(6): 668-672
      秦福文, 顾彪, 徐茵, 杨大智. 蓝宝石衬底的ECR等离子体清洗与氮化的RHEED研究[J]. 半导体学报(英文版), 2003, 24(6): 668-672.
      Citation:
      秦福文, 顾彪, 徐茵, 杨大智. 蓝宝石衬底的ECR等离子体清洗与氮化的RHEED研究[J]. 半导体学报(英文版), 2003, 24(6): 668-672.
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      • Received Date: 2015-08-20

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