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卢基存, 宗祥福, 吴建华, 林添明. 倒装芯片中铝腐蚀的红外显微镜观测研究[J]. 半导体学报(英文版), 1999, 20(10): 906-910.
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Received: 19 August 2015 Revised: Online: Published: 01 October 1999
Citation: |
卢基存, 宗祥福, 吴建华, 林添明. 倒装芯片中铝腐蚀的红外显微镜观测研究[J]. 半导体学报(英文版), 1999, 20(10): 906-910.
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