Chin. J. Semicond. > 2000, Volume 21 > Issue 2 > 137-141
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MOVPE法生长AlGaAs过程中Al分配系数的动力学研究

公延宁 , 莫金玑 , 余海生 and 夏冠群

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Key words: AlGaAs, 金属有机物气相外延, Al的分配系数, 动力学

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    Received: 20 August 2015 Revised: Online: Published: 01 February 2000

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      Article Navigation >  Journal of Semiconductors  > 2000  >  21(2): 137-141
      公延宁, 莫金玑, 余海生, 夏冠群. MOVPE法生长AlGaAs过程中Al分配系数的动力学研究[J]. 半导体学报(英文版), 2000, 21(2): 137-141.
      Citation:
      公延宁, 莫金玑, 余海生, 夏冠群. MOVPE法生长AlGaAs过程中Al分配系数的动力学研究[J]. 半导体学报(英文版), 2000, 21(2): 137-141.
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      • Received Date: 2015-08-20

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