Chin. J. Semicond. > 2002, Volume 23 > Issue 1 > 16-20
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CMOS兼容近红外Si_(0.7)Ge_(0.3)/Si

郭辉 , 郭维廉 , 郑云光 , 黎晨 , 陈培毅 , 李树荣 and 吴霞宛

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Key words: SOI, SiGe, p-i-n光电探测器, 光探测

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    Received: 19 August 2015 Revised: Online: Published: 01 January 2002

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      Article Navigation >  Journal of Semiconductors  > 2002  >  23(1): 16-20
      郭辉, 郭维廉, 郑云光, 黎晨, 陈培毅, 李树荣, 吴霞宛. CMOS兼容近红外Si_(0.7)Ge_(0.3)/Si[J]. 半导体学报(英文版), 2002, 23(1): 16-20.
      Citation:
      郭辉, 郭维廉, 郑云光, 黎晨, 陈培毅, 李树荣, 吴霞宛. CMOS兼容近红外Si_(0.7)Ge_(0.3)/Si[J]. 半导体学报(英文版), 2002, 23(1): 16-20.
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      • Received Date: 2015-08-19

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