Chin. J. Semicond. > 1984, Volume 5 > Issue 1 > 56-65
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用于GaAs的新腐蚀液的腐蚀特性和动力学

王立模

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    Received: 20 August 2015 Revised: Online: Published: 01 January 1984

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      Article Navigation >  Journal of Semiconductors  > 1984  >  5(1): 56-65
      王立模. 用于GaAs的新腐蚀液的腐蚀特性和动力学[J]. 半导体学报(英文版), 1984, 5(1): 56-65.
      Citation:
      王立模. 用于GaAs的新腐蚀液的腐蚀特性和动力学[J]. 半导体学报(英文版), 1984, 5(1): 56-65.
      shu

      • Received Date: 2015-08-20

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