Chin. J. Semicond. > 2003, Volume 24 > Issue 3 > 234-237
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氦离子注入形成980nm脊型波导激光器腔面非注入区的研究(英文)

刘斌 , 张敬明 , 马骁宇 and 肖建伟

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Key words: 980nm半导体激光器, 可靠性, 氦离子注入, 非注入区, COD

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    Received: 20 August 2015 Revised: Online: Published: 01 March 2003

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      Article Navigation >  Journal of Semiconductors  > 2003  >  24(3): 234-237
      刘斌, 张敬明, 马骁宇, 肖建伟. 氦离子注入形成980nm脊型波导激光器腔面非注入区的研究(英文)[J]. 半导体学报(英文版), 2003, 24(3): 234-237.
      Citation:
      刘斌, 张敬明, 马骁宇, 肖建伟. 氦离子注入形成980nm脊型波导激光器腔面非注入区的研究(英文)[J]. 半导体学报(英文版), 2003, 24(3): 234-237.
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      • Received Date: 2015-08-20

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