Chin. J. Semicond. > 2000, Volume 21 > Issue 5 > 504-508
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测定硅各向异性腐蚀速率分布的新方法

杨恒 , 鲍敏杭 , 沈绍群 , 李昕欣 , 张大成 and 武国英

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Key words: 硅, 各向异性腐蚀, KOH

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    Received: 20 August 2015 Revised: Online: Published: 01 May 2000

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      Article Navigation >  Journal of Semiconductors  > 2000  >  21(5): 504-508
      杨恒, 鲍敏杭, 沈绍群, 李昕欣, 张大成, 武国英. 测定硅各向异性腐蚀速率分布的新方法[J]. 半导体学报(英文版), 2000, 21(5): 504-508.
      Citation:
      杨恒, 鲍敏杭, 沈绍群, 李昕欣, 张大成, 武国英. 测定硅各向异性腐蚀速率分布的新方法[J]. 半导体学报(英文版), 2000, 21(5): 504-508.
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      • Received Date: 2015-08-20

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