Abstract: The evolution of microelectronics to nanoelectronics is discussed based on the device figure of merit( power delay product), while an overview of their current development situation is given. In the same time, it is indicated that in the course of SOC ( system on a chip) development the introduction of new, much powerful than the conventional, information processing system is inevitable. Finally, some expectations of the main differences between microelectronics and nanoelectronics are given.

Key words: microelectronics,  nanoelectronics,  nanoeletronic device,  device figure of merit