Citation: |
Wang Zhanhe, Wu Haixia, 蒋煜婧, Jiang Yujing, Xing Maoteng. Crystalline Properties of Nanocrystalline SnO2 Thin Films[J]. Journal of Semiconductors, 2003, 24(S1): 110-113.
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Wang Z H, Wu H X, Jiang Y J, Xing M T. Crystalline Properties of Nanocrystalline SnO2 Thin Films[J]. Chin. J. Semicond., 2003, 24(S1): 110.
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Crystalline Properties of Nanocrystalline SnO2 Thin Films
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Abstract
Nanocrystalline tin oxide transparent conducting thin films are prepared by the method of the direct current magnetron sputtering in a mixture gas ofar and O2 , and at substrate temperature 150~ 400C . The films show preferred orientation in [110] and [211] plane by X-ray diffraction. The crystalline properties of nanocrystalline SnO2 Sb thin films depends on the substrate temperature. The surface and section morphology are obtained at loW and high substrate temperature by FE-SEM. -
References
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