Chin. J. Semicond. > 2003, Volume 24 > Issue S1 > 110-113

Crystalline Properties of Nanocrystalline SnO2 Thin Films

Wang Zhanhe, Wu Haixia, 蒋煜婧, Jiang Yujing and Xing Maoteng

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Abstract: Nanocrystalline tin oxide transparent conducting thin films are prepared by the method of the direct current magnetron sputtering in a mixture gas ofar and O2 , and at substrate temperature 150~ 400C . The films show preferred orientation in [110] and [211] plane by X-ray diffraction. The crystalline properties of nanocrystalline SnO2 Sb thin films depends on the substrate temperature. The surface and section morphology are obtained at loW and high substrate temperature by FE-SEM.

Key words: magnetron sputtering, nanocrystalline, SnO2 thin films, crystalline properties, FE-SEM 纳米晶 SnO2 薄膜 结晶特性 FE-SEM

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    Received: 16 March 2016 Revised: Online: Published: 01 January 2003

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      Wang Zhanhe, Wu Haixia, 蒋煜婧, Jiang Yujing, Xing Maoteng. Crystalline Properties of Nanocrystalline SnO2 Thin Films[J]. Journal of Semiconductors, 2003, 24(S1): 110-113. ****Wang Z H, Wu H X, Jiang Y J, Xing M T. Crystalline Properties of Nanocrystalline SnO2 Thin Films[J]. Chin. J. Semicond., 2003, 24(S1): 110.
      Citation:
      Wang Zhanhe, Wu Haixia, 蒋煜婧, Jiang Yujing, Xing Maoteng. Crystalline Properties of Nanocrystalline SnO2 Thin Films[J]. Journal of Semiconductors, 2003, 24(S1): 110-113. ****
      Wang Z H, Wu H X, Jiang Y J, Xing M T. Crystalline Properties of Nanocrystalline SnO2 Thin Films[J]. Chin. J. Semicond., 2003, 24(S1): 110.

      Crystalline Properties of Nanocrystalline SnO2 Thin Films

      • Received Date: 2016-03-16
      • Published Date: 2016-03-15

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