Citation: |
李映雪, 李玉铭, 李山东. Ti/SiO_2(薄)/Si体系在微量氧存在的氮气中退火过程的研究[J]. 半导体学报(英文版), 1993, 14(10): 637-643.
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Received: 20 August 2015 Revised: Online: Published: 01 October 1993
Citation: |
李映雪, 李玉铭, 李山东. Ti/SiO_2(薄)/Si体系在微量氧存在的氮气中退火过程的研究[J]. 半导体学报(英文版), 1993, 14(10): 637-643.
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