Chin. J. Semicond. > 1992, Volume 13 > Issue 12 > 763-766

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显示GaAs/AlGaAs缺陷的新方法——超声AB腐蚀

陈诺夫

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    Received: 19 August 2015 Revised: Online: Published: 01 December 1992

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      陈诺夫. 显示GaAs/AlGaAs缺陷的新方法——超声AB腐蚀[J]. 半导体学报(英文版), 1992, 13(12): 763-766.
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      陈诺夫. 显示GaAs/AlGaAs缺陷的新方法——超声AB腐蚀[J]. 半导体学报(英文版), 1992, 13(12): 763-766.

      • Received Date: 2015-08-19

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