Chin. J. Semicond. > 2000, Volume 21 > Issue 5 > 517-520

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LPCVD氮化硅薄膜的室温可见光发射

刘渝珍 , 石万全 , 韩一琴 , 刘世祥 , 赵玲莉 , 孙宝银 , 叶甜春 and 陈梦真

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Key words: 激发, LPCVD, 光致发光, 能隙态模型

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    Received: 20 August 2015 Revised: Online: Published: 01 May 2000

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      Article Navigation >  Journal of Semiconductors  > 2000  >  21(5): 517-520
      刘渝珍, 石万全, 韩一琴, 刘世祥, 赵玲莉, 孙宝银, 叶甜春, 陈梦真. LPCVD氮化硅薄膜的室温可见光发射[J]. 半导体学报(英文版), 2000, 21(5): 517-520.
      Citation:
      刘渝珍, 石万全, 韩一琴, 刘世祥, 赵玲莉, 孙宝银, 叶甜春, 陈梦真. LPCVD氮化硅薄膜的室温可见光发射[J]. 半导体学报(英文版), 2000, 21(5): 517-520.
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      • Received Date: 2015-08-20

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