Chin. J. Semicond. > 1995, Volume 16 > Issue 2 > 149-152
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一种硅基集成微晃动马达

孙曦庆，谢会开，刘理天，李志坚，钱佩信

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    Received: 19 August 2015 Revised: Online: Published: 01 February 1995

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      Article Navigation >  Journal of Semiconductors  > 1995  >  16(2): 149-152
      孙曦庆，谢会开，刘理天，李志坚，钱佩信. 一种硅基集成微晃动马达[J]. 半导体学报(英文版), 1995, 16(2): 149-152.
      Citation:
      孙曦庆，谢会开，刘理天，李志坚，钱佩信. 一种硅基集成微晃动马达[J]. 半导体学报(英文版), 1995, 16(2): 149-152.
      shu

      • Received Date: 2015-08-19

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