Chin. J. Semicond. > 2004, Volume 25 > Issue 11 > 1464-1468
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Al/SiO_2/Si表面Al_2O_3纳米图形的AFM阳极氧化制备方法

焦正 , 李珍 , 吴明红 , 顾建忠 and 王德庆

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Key words: 纳米图形, 纳米线, 阳极氧化, AFM

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    Received: 19 August 2015 Revised: Online: Published: 01 November 2004

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      Article Navigation >  Journal of Semiconductors  > 2004  >  25(11): 1464-1468
      焦正, 李珍, 吴明红, 顾建忠, 王德庆. Al/SiO_2/Si表面Al_2O_3纳米图形的AFM阳极氧化制备方法[J]. 半导体学报(英文版), 2004, 25(11): 1464-1468.
      Citation:
      焦正, 李珍, 吴明红, 顾建忠, 王德庆. Al/SiO_2/Si表面Al_2O_3纳米图形的AFM阳极氧化制备方法[J]. 半导体学报(英文版), 2004, 25(11): 1464-1468.
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      • Received Date: 2015-08-19

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