Citation: |
Li Min, Huang Qing'an, Li Weihua. A Nodal Analysis Method for Electrically Actuated Bow-tie Shaped Fixed-Fixed Beams[J]. Journal of Semiconductors, 2008, 29(12): 2432-2436.
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Li M, Huang Q, Li W H. A Nodal Analysis Method for Electrically Actuated Bow-tie Shaped Fixed-Fixed Beams[J]. J. Semicond., 2008, 29(12): 2432.
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A Nodal Analysis Method for Electrically Actuated Bow-tie Shaped Fixed-Fixed Beams
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Abstract
In order to perform mixed-domain simulation of electrically actuated bow-tie shaped fixed-fixed beams,the governing equations treatment for trapeziform beam elements under electrostatic load was carried out based on a Galerkin residual method.The nodal model for the trapeziform beam and corresponding equivalent circuit is developed by HSpice.It proves accurate in comparison with FEA results and experiment results given by the Reference. -
References
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Proportional views