Chin. J. Semicond. > 2001, Volume 22 > Issue 12 > 1546-1550
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硅基SiO_2光波导

徐永青 , 梁春广 , 杨拥军 and 赵彤

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Key words: 二氧化硅, 光波导, 氢氧焰淀积, 微电子机械系统

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    Received: 20 August 2015 Revised: Online: Published: 01 December 2001

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      Article Navigation >  Journal of Semiconductors  > 2001  >  22(12): 1546-1550
      徐永青, 梁春广, 杨拥军, 赵彤. 硅基SiO_2光波导[J]. 半导体学报(英文版), 2001, 22(12): 1546-1550.
      Citation:
      徐永青, 梁春广, 杨拥军, 赵彤. 硅基SiO_2光波导[J]. 半导体学报(英文版), 2001, 22(12): 1546-1550.
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      • Received Date: 2015-08-20

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