Chin. J. Semicond. > 1990, Volume 11 > Issue 12 > 942-945
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冷发射电子束掺杂磷

李秀琼 , 王培大 , 马祥彬 and 王纯

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    Received: 19 August 2015 Revised: Online: Published: 01 December 1990

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      Article Navigation >  Journal of Semiconductors  > 1990  >  11(12): 942-945
      李秀琼, 王培大, 马祥彬, 王纯. 冷发射电子束掺杂磷[J]. 半导体学报(英文版), 1990, 11(12): 942-945.
      Citation:
      李秀琼, 王培大, 马祥彬, 王纯. 冷发射电子束掺杂磷[J]. 半导体学报(英文版), 1990, 11(12): 942-945.
      shu

      • Received Date: 2015-08-19

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