Chin. J. Semicond. > 2003, Volume 24 > Issue 1 > 76-79
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氮注入多晶硅栅对超薄SiO_2栅介质性能的影响

许晓燕 , 谭静荣 , 黄如 and 张兴

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Key words: 栅介质, 氮注入, 硼扩散

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    Received: 20 August 2015 Revised: Online: Published: 01 January 2003

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      Article Navigation >  Journal of Semiconductors  > 2003  >  24(1): 76-79
      许晓燕, 谭静荣, 黄如, 张兴. 氮注入多晶硅栅对超薄SiO_2栅介质性能的影响[J]. 半导体学报(英文版), 2003, 24(1): 76-79.
      Citation:
      许晓燕, 谭静荣, 黄如, 张兴. 氮注入多晶硅栅对超薄SiO_2栅介质性能的影响[J]. 半导体学报(英文版), 2003, 24(1): 76-79.
      shu

      • Received Date: 2015-08-20

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