Chin. J. Semicond. > 1998, Volume 19 > Issue 9 > 698-701
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氮化物半导体GaN的光辅助湿法腐蚀

章蓓 , 黄其煜 , 周大勇 , 戴伦 and 张国义

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    Received: 18 August 2015 Revised: Online: Published: 01 September 1998

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      Article Navigation >  Journal of Semiconductors  > 1998  >  19(9): 698-701
      章蓓, 黄其煜, 周大勇, 戴伦, 张国义. 氮化物半导体GaN的光辅助湿法腐蚀[J]. 半导体学报(英文版), 1998, 19(9): 698-701.
      Citation:
      章蓓, 黄其煜, 周大勇, 戴伦, 张国义. 氮化物半导体GaN的光辅助湿法腐蚀[J]. 半导体学报(英文版), 1998, 19(9): 698-701.
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      • Received Date: 2015-08-18

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