Chin. J. Semicond. > 1985, Volume 6 > Issue 6 > 627-633
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Sigmund元素溅射率公式的修正

陈国樑

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    Received: 20 August 2015 Revised: Online: Published: 01 June 1985

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      Article Navigation >  Journal of Semiconductors  > 1985  >  6(6): 627-633
      陈国樑. Sigmund元素溅射率公式的修正[J]. 半导体学报(英文版), 1985, 6(6): 627-633.
      Citation:
      陈国樑. Sigmund元素溅射率公式的修正[J]. 半导体学报(英文版), 1985, 6(6): 627-633.
      shu

      • Received Date: 2015-08-20

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