Chin. J. Semicond. > 1997, Volume 18 > Issue 1 > 54-57
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不同制备工艺对SIMOX结构应力的影响

蒋美萍 , 李金华 , 黄宜平 and 林成鲁

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    Received: 19 August 2015 Revised: Online: Published: 01 January 1997

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      Article Navigation >  Journal of Semiconductors  > 1997  >  18(1): 54-57
      蒋美萍, 李金华, 黄宜平, 林成鲁. 不同制备工艺对SIMOX结构应力的影响[J]. 半导体学报(英文版), 1997, 18(1): 54-57.
      Citation:
      蒋美萍, 李金华, 黄宜平, 林成鲁. 不同制备工艺对SIMOX结构应力的影响[J]. 半导体学报(英文版), 1997, 18(1): 54-57.
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      • Received Date: 2015-08-19

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