| Citation: |
Gao Chaoqun, Jiao Binbin, Liu Maozhe, Li Quanbao, Yang Kai, Shi Shali, Li Zhigang, Ou Yi, Jing Yupeng, Chen Dapeng. MEMS/CMOS Compatible Gas Sensors Based on Spectroscopy Analysis[J]. Journal of Semiconductors, 2008, 29(10): 2043-2049.
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Gao C Q, Jiao B B, Liu M Z, Li Q B, Yang K, Shi S L, Li Z G, Ou Y, Jing Y P, Chen D P. MEMS/CMOS Compatible Gas Sensors Based on Spectroscopy Analysis[J]. J. Semicond., 2008, 29(10): 2043.
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MEMS/CMOS Compatible Gas Sensors Based on Spectroscopy Analysis
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Abstract
A novel MEMS/CMOS compatible gas sensor based on spectroscopy analysis,which is fabricated on a (110) silicon wafer,is proposed.Its main principle,structure,and fabrications are introduced in detail.The gas sensor gains high sensitivity and selectivity but has low power consumption,and it should detect the grads of gas concentration for the mentioned advantages.-
Keywords:
- MEMS,
- gas sensor,
- spectroscopy analysis
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References
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