Chin. J. Semicond. > 1999, Volume 20 > Issue 9 > 804-810

Effects of Sputtering Power on Structural,ElectricalandOpticalPropertiesof Indium -tin-oxide Thin Film s

Wang Zhongchun , Chen Jiefeng and Hu Xingfang

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Received: 19 August 2015 Revised: Online: Published: 01 September 1999

Article Navigation > Journal of Semiconductors > 1999 > 20(9): 804-810

Wang Zhongchun, Chen Jiefeng, Hu Xingfang. Effects of Sputtering Power on Structural,ElectricalandOpticalPropertiesof Indium -tin-oxide Thin Film s[J]. 半导体学报(英文版), 1999, 20(9): 804-810.

Citation:

Wang Zhongchun, Chen Jiefeng, Hu Xingfang. Effects of Sputtering Power on Structural,ElectricalandOpticalPropertiesof Indium -tin-oxide Thin Film s[J]. 半导体学报(英文版), 1999, 20(9): 804-810.

Wang Zhongchun, Chen Jiefeng, Hu Xingfang. Effects of Sputtering Power on Structural,ElectricalandOpticalPropertiesof Indium -tin-oxide Thin Film s[J]. 半导体学报(英文版), 1999, 20(9): 804-810.

Citation:

Wang Zhongchun, Chen Jiefeng, Hu Xingfang. Effects of Sputtering Power on Structural,ElectricalandOpticalPropertiesof Indium -tin-oxide Thin Film s[J]. 半导体学报(英文版), 1999, 20(9): 804-810.

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