Chin. J. Semicond. > 1996, Volume 17 > Issue 11 > 877-880

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硅基上直流反应磁控溅射沉积优质ZnO薄膜及其性能研究

李剑光，叶志镇，赵炳辉，袁骏

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    Received: 18 August 2015 Revised: Online: Published: 01 November 1996

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      Article Navigation >  Journal of Semiconductors  > 1996  >  17(11): 877-880
      李剑光，叶志镇，赵炳辉，袁骏. 硅基上直流反应磁控溅射沉积优质ZnO薄膜及其性能研究[J]. 半导体学报(英文版), 1996, 17(11): 877-880.
      Citation:
      李剑光，叶志镇，赵炳辉，袁骏. 硅基上直流反应磁控溅射沉积优质ZnO薄膜及其性能研究[J]. 半导体学报(英文版), 1996, 17(11): 877-880.
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      • Received Date: 2015-08-18

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