Chin. J. Semicond. > 1997, Volume 18 > Issue 1 > 76-80

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GaAs/AlGaAs HBT器件的S_2Cl_2钝化

曹先安 , 陈溪滢 , 李喆深 , 苏润洲 , 丁训民 , 侯晓远 , 钱峰 , 姚晓峨 and 陈效建

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    Received: 19 August 2015 Revised: Online: Published: 01 January 1997

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      Article Navigation >  Journal of Semiconductors  > 1997  >  18(1): 76-80
      曹先安, 陈溪滢, 李喆深, 苏润洲, 丁训民, 侯晓远, 钱峰, 姚晓峨, 陈效建. GaAs/AlGaAs HBT器件的S_2Cl_2钝化[J]. 半导体学报(英文版), 1997, 18(1): 76-80.
      Citation:
      曹先安, 陈溪滢, 李喆深, 苏润洲, 丁训民, 侯晓远, 钱峰, 姚晓峨, 陈效建. GaAs/AlGaAs HBT器件的S_2Cl_2钝化[J]. 半导体学报(英文版), 1997, 18(1): 76-80.
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      • Received Date: 2015-08-19

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