Citation: |
Zhuang Zhiwei, Wang Zheyao, Liu Litian. Design and Optimization of SOI Piezoresistive MicrocantileverSensors for Use in Surface Stress Measurement[J]. Journal of Semiconductors, 2006, 27(10): 1844-1850.
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Zhuang Z W, Wang Z Y, Liu L T. Design and Optimization of SOI Piezoresistive MicrocantileverSensors for Use in Surface Stress Measurement[J]. Chin. J. Semicond., 2006, 27(10): 1844.
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Design and Optimization of SOI Piezoresistive MicrocantileverSensors for Use in Surface Stress Measurement
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Abstract
The dynamic and static characteristics of SOI piezoresistive microcantilever sensors are studied.Expressions for predicting the sensitivity and resolution of sensors used in surface stress measurement are derived.According to analysis of the influence of the parameters on the performance of the sensors,a parameter design and optimization process is presented.A suit of design parameters is deduced,with a sensitivity of -1.8E-3m/N,a resolution of 8.5E-5N/m,an elasticity coefficient of 0.023N/m,and a resonance frequency of 1.3E4Hz.-
Keywords:
- MEMS,
- piezoresistive,
- SOI,
- surface stress measurement,
- cantilever,
- sensor
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References
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Proportional views