Chin. J. Semicond. > 1997, Volume 18 > Issue 7 > 518-522
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横向加速度传感器设计及特性研究

朱海军 , 陈宏 and 鲍敏杭

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    Received: 19 August 2015 Revised: Online: Published: 01 July 1997

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      Article Navigation >  Journal of Semiconductors  > 1997  >  18(7): 518-522
      朱海军, 陈宏, 鲍敏杭. 横向加速度传感器设计及特性研究[J]. 半导体学报(英文版), 1997, 18(7): 518-522.
      Citation:
      朱海军, 陈宏, 鲍敏杭. 横向加速度传感器设计及特性研究[J]. 半导体学报(英文版), 1997, 18(7): 518-522.
      shu

      • Received Date: 2015-08-19

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