Chin. J. Semicond. > 1997, Volume 18 > Issue 12 > 901-906
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新型真空微电子压力传感器特性研究和实验制作

夏善红 , 刘加 , 陈绍凤 , 韩泾鸿 and 崔大付

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    Received: 19 August 2015 Revised: Online: Published: 01 December 1997

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      Article Navigation >  Journal of Semiconductors  > 1997  >  18(12): 901-906
      夏善红, 刘加, 陈绍凤, 韩泾鸿, 崔大付. 新型真空微电子压力传感器特性研究和实验制作[J]. 半导体学报(英文版), 1997, 18(12): 901-906.
      Citation:
      夏善红, 刘加, 陈绍凤, 韩泾鸿, 崔大付. 新型真空微电子压力传感器特性研究和实验制作[J]. 半导体学报(英文版), 1997, 18(12): 901-906.
      shu

      • Received Date: 2015-08-19

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