PAPERS
Li Li, Zhao Zhengping, Zhang Zhiguo, Guo Wensheng, Lü Miao and Yang Ruixia
Abstract: A 2GHz LC VCO is fabricated using a micromachined variable capacitor for frequency tuning.The MEMS variable capacitors,whose controlling plates and capacitor plates are separated,are fabricated in a surface micromachining process.These devices have a quality factor of 38.462 at 2GHz.The MEMS VCO operating at 2.007GHz achieves a single side band phase-noise of -107.5dBc/Hz at a 100kHz offset from the carrier and an output power of -13.67dBm.On the basis of analysis of VCO mechanical-thermal noise produced from the micromachined variable capacitor,a method for lowering the phase noise by reducing the squeeze damping is proposed and an optimized number of damping holes is obtained.
Key words: MEMS, variable capacitor, quality factor, VCO, phase noise
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Received: 20 August 2015 Revised: Online: Published: 01 May 2006
| Citation: |
Li Li, Zhao Zhengping, Zhang Zhiguo, Guo Wensheng, Lü Miao, Yang Ruixia. Voltage Controlled Oscillator[J]. Journal of Semiconductors, 2006, 27(5): 900-904.
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Li L, Zhao Z P, Zhang Z G, Guo W S, Lü M, Yang R X. Voltage Controlled Oscillator[J]. Chin. J. Semicond., 2006, 27(5): 900.
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