Chin. J. Semicond. > 1984, Volume 5 > Issue 5 > 508-515
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氢化非晶及微晶硅的氢含量和红外光谱研究

何宇亮 , 颜永红 , 殷晨钟 , 玉志超 , 沈学础 and 朱浩荣

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    Received: 20 August 2015 Revised: Online: Published: 01 May 1984

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      Article Navigation >  Journal of Semiconductors  > 1984  >  5(5): 508-515
      何宇亮, 颜永红, 殷晨钟, 玉志超, 沈学础, 朱浩荣. 氢化非晶及微晶硅的氢含量和红外光谱研究[J]. 半导体学报(英文版), 1984, 5(5): 508-515.
      Citation:
      何宇亮, 颜永红, 殷晨钟, 玉志超, 沈学础, 朱浩荣. 氢化非晶及微晶硅的氢含量和红外光谱研究[J]. 半导体学报(英文版), 1984, 5(5): 508-515.
      shu

      • Received Date: 2015-08-20

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