Chin. J. Semicond. > 2001, Volume 22 > Issue 3 > 261-264
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用于光电子器件的低成本、高反射率SOR衬底(英文)

李成 , 杨沁青 , 王红杰 and 王启明

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Key words: SOR, SiO2/Si布拉格反射器, 智能剥离技术, 光电子器件, 光探测器

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    Received: 19 August 2015 Revised: Online: Published: 01 March 2001

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      Article Navigation >  Journal of Semiconductors  > 2001  >  22(3): 261-264
      李成, 杨沁青, 王红杰, 王启明. 用于光电子器件的低成本、高反射率SOR衬底(英文)[J]. 半导体学报(英文版), 2001, 22(3): 261-264.
      Citation:
      李成, 杨沁青, 王红杰, 王启明. 用于光电子器件的低成本、高反射率SOR衬底(英文)[J]. 半导体学报(英文版), 2001, 22(3): 261-264.
      shu

      • Received Date: 2015-08-19

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