Chin. J. Semicond. > 2003, Volume 24 > Issue 10 > 1103-1108
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刻蚀衍射光栅像差特性分析

宋军 , 梅维泉 , 文泓桥 and 何赛灵

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Key words: 刻蚀衍射光栅(EDG), 波分复用, 波像差, 球差, 彗差, 串扰, 耦合效率

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    Received: 20 August 2015 Revised: Online: Published: 01 October 2003

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      Article Navigation >  Journal of Semiconductors  > 2003  >  24(10): 1103-1108
      宋军, 梅维泉, 文泓桥, 何赛灵. 刻蚀衍射光栅像差特性分析[J]. 半导体学报(英文版), 2003, 24(10): 1103-1108.
      Citation:
      宋军, 梅维泉, 文泓桥, 何赛灵. 刻蚀衍射光栅像差特性分析[J]. 半导体学报(英文版), 2003, 24(10): 1103-1108.
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      • Received Date: 2015-08-20

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