Chin. J. Semicond. > 2003, Volume 24 > Issue S1 > 56-59

Kinetic monte Carlo simulation of initial nucleation stage of 2D Ge islands

Deng Ning, Xiao Hong, Chen Peiyi and Li Zhijian

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Abstract: Initial nucleation stage of 2D Ge islands during the self-assembled groWth of Ge islands in Si/Ge mismatch system is studied by Kinetic Monte Carlo ( KMC) simulation. The diffusion barrier is corrected by introducing a strain field induced by adsorbed atoms. The influence of stain and substrate temperature on nucleation sites and size is investigated. The nucleation of 2D islands is determined by strain field and the self-assembled growth can be controlled by modulating the stain on the surface.

Key words: kinetic Monte Carlo simulation self-assembled growth strain field

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    Received: 16 March 2016 Revised: Online: Published: 01 January 2003

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      Deng Ning, Xiao Hong, Chen Peiyi, Li Zhijian. Kinetic monte Carlo simulation of initial nucleation stage of 2D Ge islands[J]. Journal of Semiconductors, 2003, 24(S1): 56-59. ****Deng N, Xiao H, Chen P Y, Li Z J. Kinetic monte Carlo simulation of initial nucleation stage of 2D Ge islands[J]. Chin. J. Semicond., 2003, 24(S1): 56.
      Citation:
      Deng Ning, Xiao Hong, Chen Peiyi, Li Zhijian. Kinetic monte Carlo simulation of initial nucleation stage of 2D Ge islands[J]. Journal of Semiconductors, 2003, 24(S1): 56-59. ****
      Deng N, Xiao H, Chen P Y, Li Z J. Kinetic monte Carlo simulation of initial nucleation stage of 2D Ge islands[J]. Chin. J. Semicond., 2003, 24(S1): 56.

      Kinetic monte Carlo simulation of initial nucleation stage of 2D Ge islands

      • Received Date: 2016-03-16
      • Published Date: 2016-03-15

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