Chin. J. Semicond. > 1985, Volume 6 > Issue 4 > 437-441
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原子氢钝化硅中与铜有关的缺陷

王忠安 , 陈开茅 and 秦国刚

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    Received: 20 August 2015 Revised: Online: Published: 01 April 1985

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      Article Navigation >  Journal of Semiconductors  > 1985  >  6(4): 437-441
      王忠安, 陈开茅, 秦国刚. 原子氢钝化硅中与铜有关的缺陷[J]. 半导体学报(英文版), 1985, 6(4): 437-441.
      Citation:
      王忠安, 陈开茅, 秦国刚. 原子氢钝化硅中与铜有关的缺陷[J]. 半导体学报(英文版), 1985, 6(4): 437-441.
      shu

      • Received Date: 2015-08-20

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