Chin. J. Semicond. > 1992, Volume 13 > Issue 8 > 507-510
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静电封接过程与机理研究

罗鸣 , 赵新安 , 张熙 , 谭淞生 and 王渭源

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    Received: 19 August 2015 Revised: Online: Published: 01 August 1992

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      Article Navigation >  Journal of Semiconductors  > 1992  >  13(8): 507-510
      罗鸣, 赵新安, 张熙, 谭淞生, 王渭源. 静电封接过程与机理研究[J]. 半导体学报(英文版), 1992, 13(8): 507-510.
      Citation:
      罗鸣, 赵新安, 张熙, 谭淞生, 王渭源. 静电封接过程与机理研究[J]. 半导体学报(英文版), 1992, 13(8): 507-510.
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      • Received Date: 2015-08-19

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