Citation: |
王言, 王毕南, 晋琦, 鲍敏杭. 硅十字梁单块力传感器[J]. 半导体学报(英文版), 1990, 11(5): 375-379.
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References
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Proportional views
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Received: 19 August 2015 Revised: Online: Published: 01 May 1990
Citation: |
王言, 王毕南, 晋琦, 鲍敏杭. 硅十字梁单块力传感器[J]. 半导体学报(英文版), 1990, 11(5): 375-379.
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