Chin. J. Semicond. > 2005, Volume 26 > Issue 7 > 1412-1417
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微热板式低气压传感器的研制

张凤田 , 唐祯安 , 余隽 , 金仁成 , 高仁璟 and 江胜峰

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Key words: 微热板, 气压传感器, 微传感器, 传热, 恒电流

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    Received: 18 August 2015 Revised: Online: Published: 01 July 2005

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      Article Navigation >  Journal of Semiconductors  > 2005  >  26(7): 1412-1417
      张凤田, 唐祯安, 余隽, 金仁成, 高仁璟, 江胜峰. 微热板式低气压传感器的研制[J]. 半导体学报(英文版), 2005, 26(7): 1412-1417.
      Citation:
      张凤田, 唐祯安, 余隽, 金仁成, 高仁璟, 江胜峰. 微热板式低气压传感器的研制[J]. 半导体学报(英文版), 2005, 26(7): 1412-1417.
      shu

      • Received Date: 2015-08-18

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