Chin. J. Semicond. > 2002, Volume 23 > Issue 1 > 43-48
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单晶硅中氢与辐照缺陷的相互作用

王启元 , 林兰英 , 王建华 , 邓惠芳 , 谭利文 , 王俊 , 蔡田海 and 郁元桓

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Key words: 中子辐照, 退火, 辐照缺陷

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    Received: 19 August 2015 Revised: Online: Published: 01 January 2002

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      Article Navigation >  Journal of Semiconductors  > 2002  >  23(1): 43-48
      王启元, 林兰英, 王建华, 邓惠芳, 谭利文, 王俊, 蔡田海, 郁元桓. 单晶硅中氢与辐照缺陷的相互作用[J]. 半导体学报(英文版), 2002, 23(1): 43-48.
      Citation:
      王启元, 林兰英, 王建华, 邓惠芳, 谭利文, 王俊, 蔡田海, 郁元桓. 单晶硅中氢与辐照缺陷的相互作用[J]. 半导体学报(英文版), 2002, 23(1): 43-48.
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      • Received Date: 2015-08-19

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