Citation: |
陈国樑. 二元化合物总原子溅射率和刻蚀速率的经验公式[J]. 半导体学报(英文版), 1987, 8(4): 395-401.
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Received: 19 August 2015 Revised: Online: Published: 01 April 1987
Citation: |
陈国樑. 二元化合物总原子溅射率和刻蚀速率的经验公式[J]. 半导体学报(英文版), 1987, 8(4): 395-401.
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