Chin. J. Semicond. > 1986, Volume 7 > Issue 3 > 308-313
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电子辐照激活硅中不激活铜的DLTS测量方法

陈开茅 , 钱思敏 and 兰李桥

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    Received: 20 August 2015 Revised: Online: Published: 01 March 1986

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      Article Navigation >  Journal of Semiconductors  > 1986  >  7(3): 308-313
      陈开茅, 钱思敏, 兰李桥. 电子辐照激活硅中不激活铜的DLTS测量方法[J]. 半导体学报(英文版), 1986, 7(3): 308-313.
      Citation:
      陈开茅, 钱思敏, 兰李桥. 电子辐照激活硅中不激活铜的DLTS测量方法[J]. 半导体学报(英文版), 1986, 7(3): 308-313.
      shu

      • Received Date: 2015-08-20

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