Chin. J. Semicond. > 1998, Volume 19 > Issue 8 > 635-640

CONTENTS

X射线回摆曲线定量检测SI-GaAs抛光晶片的亚表面损伤层厚度

曹福年 , 卜俊鹏 , 吴让元 , 郑红军 , 惠峰 , 白玉珂 , 刘明焦 and 何宏家

+ Author Affiliations

PDF

    • Search

    Advanced Search >>

    GET CITATION

    shu

    Export: BibTex EndNote

    Article Metrics

    Article views: 2824 Times PDF downloads: 1583 Times Cited by: 0 Times

    History

    Received: 18 August 2015 Revised: Online: Published: 01 August 1998

    Catalog

      Email This Article

      User name:
      Email:*请输入正确邮箱
      Code:*验证码错误
      Send
      Article Navigation >  Journal of Semiconductors  > 1998  >  19(8): 635-640
      曹福年, 卜俊鹏, 吴让元, 郑红军, 惠峰, 白玉珂, 刘明焦, 何宏家. X射线回摆曲线定量检测SI-GaAs抛光晶片的亚表面损伤层厚度[J]. 半导体学报(英文版), 1998, 19(8): 635-640.
      Citation:
      曹福年, 卜俊鹏, 吴让元, 郑红军, 惠峰, 白玉珂, 刘明焦, 何宏家. X射线回摆曲线定量检测SI-GaAs抛光晶片的亚表面损伤层厚度[J]. 半导体学报(英文版), 1998, 19(8): 635-640.
      shu

      • Received Date: 2015-08-18

      Catalog

        Journal of Semiconductors © 2017 All Rights Reserved   京ICP备05085259号-2

        /

        DownLoad:  Full-Size Img  PowerPoint
        Return
        Return