Chin. J. Semicond. > 1990, Volume 11 > Issue 2 > 153-157
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GaAs基片上制作优质衍射光栅的实时监测技术的分析

谢建平 , 明海 and 多田邦雄

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    Received: 19 August 2015 Revised: Online: Published: 01 February 1990

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      Article Navigation >  Journal of Semiconductors  > 1990  >  11(2): 153-157
      谢建平, 明海, 多田邦雄. GaAs基片上制作优质衍射光栅的实时监测技术的分析[J]. 半导体学报(英文版), 1990, 11(2): 153-157.
      Citation:
      谢建平, 明海, 多田邦雄. GaAs基片上制作优质衍射光栅的实时监测技术的分析[J]. 半导体学报(英文版), 1990, 11(2): 153-157.
      shu

      • Received Date: 2015-08-19

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