Chin. J. Semicond. > 2006, Volume 27 > Issue 9 > 1526-1530

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Study on the Characteristics of SOI DTMOS with Reverse Schottky Barriers

Bi Jinshun and Hai Chaohe

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Abstract: Silicon-on-insulator dynamic threshold voltage MOSFETs with TiSi2/p-Si as reverse Schottky barriers (RSB) are presented.With this RSB scheme,DTMOS can operate beyond 0.7V,thus overcoming the drawback of DTMOS with the gate and body connected.The experimental results demonstrate that the threshold voltage in DT mode with an RSB is reduced by about 200mV at room temperature.SOI MOSFETs in DT mode with an RSB have advantages such as excellent subthreshold slope and high drivability over those under normal mode operation.The breakdown characteristics of SOI MOSFETs in the off-state are compared for the DT mode with RSB,floating body mode,normal mode.

Key words: SOIdynamic thresholdSchottky barrier

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    Received: 18 August 2015 Revised: 24 April 2006 Online: Published: 01 September 2006

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      Bi Jinshun, Hai Chaohe. Study on the Characteristics of SOI DTMOS with Reverse Schottky Barriers[J]. Journal of Semiconductors, 2006, 27(9): 1526-1530. ****Bi J S, Hai C H. Study on the Characteristics of SOI DTMOS with Reverse Schottky Barriers[J]. Chin. J. Semicond., 2006, 27(9): 1526.
      Citation:
      Bi Jinshun, Hai Chaohe. Study on the Characteristics of SOI DTMOS with Reverse Schottky Barriers[J]. Journal of Semiconductors, 2006, 27(9): 1526-1530. ****
      Bi J S, Hai C H. Study on the Characteristics of SOI DTMOS with Reverse Schottky Barriers[J]. Chin. J. Semicond., 2006, 27(9): 1526.

      Study on the Characteristics of SOI DTMOS with Reverse Schottky Barriers

      • Received Date: 2015-08-18
      • Accepted Date: 2006-02-21
      • Revised Date: 2006-04-24
      • Published Date: 2006-10-12

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