Chin. J. Semicond. > 2002, Volume 23 > Issue 4 > 440-444
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基于MATLAB的硅各向异性腐蚀过程模拟

张佩君 and 黄庆安

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Key words: 硅, 各向异性腐蚀, MATLAB, 模拟

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    Received: 19 August 2015 Revised: Online: Published: 01 April 2002

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      Article Navigation >  Journal of Semiconductors  > 2002  >  23(4): 440-444
      张佩君, 黄庆安. 基于MATLAB的硅各向异性腐蚀过程模拟[J]. 半导体学报(英文版), 2002, 23(4): 440-444.
      Citation:
      张佩君, 黄庆安. 基于MATLAB的硅各向异性腐蚀过程模拟[J]. 半导体学报(英文版), 2002, 23(4): 440-444.
      shu

      • Received Date: 2015-08-19

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