Chin. J. Semicond. > 2003, Volume 24 > Issue 3 > 332-336
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压阻加速度计的Au-Si共晶键合

王翔 , 张大成 , 李婷 , 王玮 , 阮勇 , 李修函 , 王小保 and 杜先锋

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Key words: 金, 硅, 共晶键合, 压阻式加速度计

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    Received: 20 August 2015 Revised: Online: Published: 01 March 2003

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      Article Navigation >  Journal of Semiconductors  > 2003  >  24(3): 332-336
      王翔, 张大成, 李婷, 王玮, 阮勇, 李修函, 王小保, 杜先锋. 压阻加速度计的Au-Si共晶键合[J]. 半导体学报(英文版), 2003, 24(3): 332-336.
      Citation:
      王翔, 张大成, 李婷, 王玮, 阮勇, 李修函, 王小保, 杜先锋. 压阻加速度计的Au-Si共晶键合[J]. 半导体学报(英文版), 2003, 24(3): 332-336.
      shu

      • Received Date: 2015-08-20

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