Chin. J. Semicond. > 1985, Volume 6 > Issue 2 > 195-198
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用光声谱法研究硅单晶中~(31)P~+离子注入

苏九令 , 包宗明 , 王昌平 , 陆桂华 , 倪玫 , 陈肯 , 杨中柱 , 黄正义 and 吴树恩

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    Received: 20 August 2015 Revised: Online: Published: 01 February 1985

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      Article Navigation >  Journal of Semiconductors  > 1985  >  6(2): 195-198
      苏九令, 包宗明, 王昌平, 陆桂华, 倪玫, 陈肯, 杨中柱, 黄正义, 吴树恩. 用光声谱法研究硅单晶中~(31)P~+离子注入[J]. 半导体学报(英文版), 1985, 6(2): 195-198.
      Citation:
      苏九令, 包宗明, 王昌平, 陆桂华, 倪玫, 陈肯, 杨中柱, 黄正义, 吴树恩. 用光声谱法研究硅单晶中~(31)P~+离子注入[J]. 半导体学报(英文版), 1985, 6(2): 195-198.
      shu

      • Received Date: 2015-08-20

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