Citation: |
范仁永, 郁元桓, 褚一鸣, 殷士端, 林兰英. 用离子自注入改善SOS单晶膜质量的研究[J]. 半导体学报(英文版), 1987, 8(4): 337-344.
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Received: 19 August 2015 Revised: Online: Published: 01 April 1987
Citation: |
范仁永, 郁元桓, 褚一鸣, 殷士端, 林兰英. 用离子自注入改善SOS单晶膜质量的研究[J]. 半导体学报(英文版), 1987, 8(4): 337-344.
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