Chin. J. Semicond. > 1989, Volume 10 > Issue 5 > 368-375
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CZ硅中氧沉淀的红外光谱研究

钟磊 and 赵清华

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    Received: 19 August 2015 Revised: Online: Published: 01 May 1989

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      Article Navigation >  Journal of Semiconductors  > 1989  >  10(5): 368-375
      钟磊, 赵清华. CZ硅中氧沉淀的红外光谱研究[J]. 半导体学报(英文版), 1989, 10(5): 368-375.
      Citation:
      钟磊, 赵清华. CZ硅中氧沉淀的红外光谱研究[J]. 半导体学报(英文版), 1989, 10(5): 368-375.
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      • Received Date: 2015-08-19

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